28/206/2025 / Request for market information: Mercury CV prober for semiconductor wafer analysis
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28/206/2025 / Request for market information: Mercury CV prober for semiconductor wafer analysis
Hankintailmoitustyyppi
Suunnittelu [TED eF[4]]
Julkaistu
27.3.2025
11:30
(UTC+02:00)
Organisaatio
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Kuvaus
The object of the request for information is a Mercury CV prober for semiconductor wafer analysis. The system needs to contain a Mercury CV probe, accessory and safety equipment.
Required specifications are described in more detail below.
Specifications:
Mercury CV prober
o Manual wafer loading
o Wafer size: 20x20 mm coupons to 300 mm wafers
o Mapping of up to 300 mm wafers
o C-V and I-V measurements using top and bottom side return contacts
o Mercury contact spot size: max 1 mm
o DC BIAS: up to +-3kV
o AC frequency range: 50 Hz - 1 MHz
o Full computer control of measurements, wafer mapping, data analysis and storage.
Facility requirements:
o Designed for cleanroom use: Will be installed in a ISO4 or ISO6 cleanroom
o Cabinet extract with mercury vapor filtering inside the tool cabinet
o Mercury vapor concentration measurement inside the tool cabinet
o Cleanroom floor space requirement: max 2x2m (excluding service area)
Schedule:
o The delivery must take place in 2025